JPH0334216B2 - - Google Patents

Info

Publication number
JPH0334216B2
JPH0334216B2 JP60240955A JP24095585A JPH0334216B2 JP H0334216 B2 JPH0334216 B2 JP H0334216B2 JP 60240955 A JP60240955 A JP 60240955A JP 24095585 A JP24095585 A JP 24095585A JP H0334216 B2 JPH0334216 B2 JP H0334216B2
Authority
JP
Japan
Prior art keywords
wafer
sliding ring
rotating
contact
orientation flat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60240955A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62101045A (ja
Inventor
Yoshihide Suwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP24095585A priority Critical patent/JPS62101045A/ja
Publication of JPS62101045A publication Critical patent/JPS62101045A/ja
Publication of JPH0334216B2 publication Critical patent/JPH0334216B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP24095585A 1985-10-28 1985-10-28 ウエ−ハの中心合せ装置 Granted JPS62101045A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24095585A JPS62101045A (ja) 1985-10-28 1985-10-28 ウエ−ハの中心合せ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24095585A JPS62101045A (ja) 1985-10-28 1985-10-28 ウエ−ハの中心合せ装置

Publications (2)

Publication Number Publication Date
JPS62101045A JPS62101045A (ja) 1987-05-11
JPH0334216B2 true JPH0334216B2 (en]) 1991-05-21

Family

ID=17067135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24095585A Granted JPS62101045A (ja) 1985-10-28 1985-10-28 ウエ−ハの中心合せ装置

Country Status (1)

Country Link
JP (1) JPS62101045A (en])

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6428934A (en) * 1987-07-24 1989-01-31 Hitachi Electr Eng Wafer-positioning mechanism of surface inspection device
JPH0328091U (en]) * 1989-07-29 1991-03-20
US5980195A (en) * 1996-04-24 1999-11-09 Tokyo Electron, Ltd. Positioning apparatus for substrates to be processed
US6334398B1 (en) * 2000-04-28 2002-01-01 Tokyo Electron Limited Variable gap stop which can be used in a semiconductor processing device
DE10121115A1 (de) * 2001-04-28 2002-10-31 Leica Microsystems Haltevorrichtung für Wafer
JP4603209B2 (ja) * 2001-08-23 2010-12-22 株式会社アドバンテスト ウエハ搬送用の位置決め固定装置
US7128823B2 (en) 2002-07-24 2006-10-31 Applied Materials, Inc. Anolyte for copper plating
EP1694885A4 (en) * 2003-04-18 2007-12-19 Applied Materials Inc METAL SEPARATION SYSTEM WITH MULTIPLE CHEMISMS
CN102794569B (zh) * 2012-08-31 2015-05-20 昆山市和博电子科技有限公司 晶片电阻激光自动划线设备
JP6580544B2 (ja) * 2016-10-20 2019-09-25 エーエスエムエル ネザーランズ ビー．ブイ． 基板支持ユニット上に基板を位置合わせする方法および装置
US10133186B2 (en) 2016-10-20 2018-11-20 Mapper Lithography Ip B.V. Method and apparatus for aligning substrates on a substrate support unit
KR102292336B1 (ko) * 2019-09-27 2021-08-24 무진전자 주식회사 웨이퍼를 안정적으로 그립하는 스핀척 장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5234585A (en) * 1975-09-12 1977-03-16 Yoshio Shigeoka Method for checking numbers of operation tools
JPS6062491A (ja) * 1983-09-09 1985-04-10 藏野　正彦 自転及び公転可能な回転式チヤツク

Also Published As

Publication number Publication date
JPS62101045A (ja) 1987-05-11

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